Effects of annealing on irradiated SiC piezoresistive pressure sensor
Creators
- 1. Mush Alparslan University, Mush (Turkmenistan)
- 2. Ohio State University, Columbus, OH (United States)
Description
The effects of temperature on the annealing of a silicon carbide (SiC) piezoresistive pressure sensor exposed to high-fluence neutron irradiation were investigated. The, SiC piezoresistive sensor was irradiated with gamma rays with the 60Co gamma-ray irradiator, and fast neutrons at Beam Port 1 (BP1) and at the Auxiliary Irradiation Facility (AIF) of Ohio State University's Nuclear Reactor Laboratory (OSUNRL). Annealing temperatures up to 400 .deg. C were applied to the pressure sensor. The pressure-output voltage results showed recovery after the SiC piezoresistive pressure sensor had been annealed. The bridge resistances of the SiC pressure sensor stayed at the same level for annealing temperatures up to 300 .deg. C. After annealing at 400 .deg. C, the resistance values of the sensor changed dramatically.
Additional details
Publishing Information
- Journal Title
- Journal of the Korean Physical Society
- Journal Volume
- 61
- Journal Issue
- 7
- Series
- 6 refs, 9 figs, 2 tabs
- Journal Page Range
- p. 1005-1009
- ISSN
- 0374-4884
INIS
- Country of Publication
- Korea, Republic of
- Country of Input or Organization
- Korea, Republic of
- INIS RN
- 45088592
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ANNEALING; COBALT 60; ELECTRIC CONDUCTIVITY; IRRADIATION; NEUTRON BEAMS; OSUR REACTOR; PRESSURE GAGES; SENSORS; SILICON CARBIDES; TEMPERATURE DEPENDENCE; TESTING
- Descriptors DEC
- BEAMS; BETA DECAY RADIOISOTOPES; BETA-MINUS DECAY RADIOISOTOPES; CARBIDES; CARBON COMPOUNDS; COBALT ISOTOPES; ELECTRICAL PROPERTIES; HEAT TREATMENTS; INTERMEDIATE MASS NUCLEI; INTERNAL CONVERSION RADIOISOTOPES; ISOMERIC TRANSITION ISOTOPES; ISOTOPES; MEASURING INSTRUMENTS; MINUTES LIVING RADIOISOTOPES; NUCLEI; NUCLEON BEAMS; ODD-ODD NUCLEI; PARTICLE BEAMS; PHYSICAL PROPERTIES; POOL TYPE REACTORS; RADIOISOTOPES; REACTORS; RESEARCH AND TEST REACTORS; SILICON COMPOUNDS; TRAINING REACTORS; WATER COOLED REACTORS; WATER MODERATED REACTORS; YEARS LIVING RADIOISOTOPES