Published March 2019 | Version v1
Journal article

Aperiodic Mirrors Based on Multilayer Beryllium Systems

  • 1. Institute for Physics of Microstructures, Russian Academy of Sciences (Russian Federation)

Description

Aperiodic multilayer mirrors (AMMs) optimized for uniform reflection within the bands of 16.5–21 and 28–33 nm are calculated by the genetic algorithm for the CORTES project. The comparative characteristic of traditional Mo/Si AMMs and beryllium-containing Mo/Be, Mo/Be/Si, Al/Be, and Mg/Be systems is given. It is demonstrated that Mo/Be/Si AMM is more preferable within the wavelength range of 16.5–21 nm, while Mg/Be AMM with a protective aluminum coating is more preferable within the band of 28–33 nm, being two and a half times superior to the corresponding Mo/Si AMM in its reflectivity.

Additional details

Identifiers

Publishing Information

Journal Title
Surface Investigation: X-ray, Synchrotron and Neutron Techniques
Journal Volume
13
Journal Issue
2
Journal Page Range
p. 267-271
ISSN
1027-4510

Optional Information

Copyright
Copyright (c) 2019 Pleiades Publishing, Ltd.