Published October 1977 | Version v1
Journal article Metadata-only

Analytical approximate equations for the resistivity and its temperature coefficient in thin polycrystalline metallic films

Creators

  • 1. Nancy-1 Univ., 54 (France). Lab. d'Electronique et Physique du Solide

Description

In the usual thickness range of sputtered metallic films, analytical linearized approximate expressions of polycrystalline film resistivity and its t.c.r. are deduced from the Mayadas-Shatzkes theoretical equations. A good experimental fit is observed for Al rf sputtered metal films. (orig.)

Abstract (German)

Auf der Basis der theoretischen Gleichungen von Mayadas-Shatzkes werden im gebraeuchlichen Dickenbereich gesputterter Metallschichten linearisierte Naeherungsausdruecke fuer den Widerstand von polykristallinen Schichten und dessen Temperaturkoeffizienten abgeleitet. Man erhaelt eine gute Uebereinstimmung mit dem Experiment bei rf-gesputterten Al-Metallschichten. (orig.)

Additional details

Identifiers

DOI
10.1007/bf00883093;

Publishing Information

Journal Title
Applied Physics
Journal Volume
14
Journal Issue
2
Series
Appl. Phys.
Journal Page Range
221-224
ISSN
0340-3793

INIS

Country of Publication
Germany
Country of Input or Organization
Germany
INIS RN
9353493
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
ALUMINIUM; ELECTRIC CONDUCTIVITY; FILMS; MATHEMATICAL MODELS; POLYCRYSTALS; SPUTTERING
Descriptors DEC
CRYSTALS; ELECTRICAL PROPERTIES; ELEMENTS; METALS; PHYSICAL PROPERTIES

Optional Information

Notes
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