Electron spectroscopies for simultaneous chemical and electrical analysis

Electrons are used as spectroscopic probes to determine elemental composition and chemistry, and are also useful as probes of the electrical properties of devices and materials. In this paper, four examples with incident and emitted electrons were used to evaluate the electrical and chemical properties of samples. These examples were the electrical conductivity of an Ag-epoxy composite, the electric field in an avalanche photodiode near breakdown, the mechanism of conductivity of semi-insulating polycrystalline films, and the charge at an oxide/semiconductor interface for high-k applications. This kind of work is very much in the spirit of the work done by Prof. Sefik Suzer.