Published April 1, 2017 | Version v1
Journal article

Reduced mobility of He+ in CF4

  • 1. Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade (Serbia)

Description

This paper is devoted to a presentation of a cross section set for the scattering of He+ ions in CF4, which is assessed by using available experimental data for exothermic charge transfer cross sections that produce C F 3 + and C F 2 + ions and endothermic charge transfer cross sections that produce CF+, C+ and F+ ions. Due to the significant particle losses, experimental transport coefficients have not been measured. Transport properties of He+ ions in CF4 needed for modeling discharges containing mentioned ions are calculated by the Monte Carlo method at a temperature of T = 300 K. Significant differences between flux and bulk transport coefficients are noticed, which is important for fluid models that exploit flux transport coefficients as input data. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1361-6595/aa61db

Additional details

Identifiers

Publishing Information

Journal Title
Plasma Sources Science and Technology
Journal Volume
26
Journal Issue
4
Journal Page Range
[4 p.]
ISSN
0963-0252