Published 2000
| Version v1
Journal article
Vanadium, molybdenum and tantalum silicide sputtering by low-energy Ar+
- 1. Fiziko-Tekhnicheskij Inst. im. A.F. Ioffe RAN, Sankt-Peterburg (Russian Federation)
- 2. Rossijskij Nauchmyj Tsentr Prikladnaya Khimiya, Sankt-Peterburg (Russian Federation)
Description
One investigates into the modification of monocrystal surface resulting from sputtering by the near-the-threshold energy ions using VSi2, MoSi2 and TaSi2 bombarded by 2-35 eV energy Ar+ ions as an example. The experimental values of the component sputtering threshold energies for vanadium, molybdenum and tantalum silicides are determined. On the basis of the experimentally investigated materials one shows the model of several collisions enables to predict correctly the values of the component sputtering threshold energies
Abstract (Russian)
Изучается модификация поверхности монокристаллов в результате распыления ионами околопороговых энергий на примере VSi2, MoSi2 и TaSi2, бомбардируемых ионами Ar+ с энергией от 2 до 35 эВ. Определены экспериментальные значения пороговых энергий распыления компонентов для силицидов ванадия, молибдена и тантала. На примере экспериментально исследованных материалов показано, что модель нескольких столкновений позволяет правильно предсказать значения пороговых энергий распыления компонентовAdditional details
Additional titles
- Original title (Russian)
- Распыление силицидов ванадия, молибдена и тантала низкоэнергетическими ионами Ар
Publishing Information
- Journal Title
- Izvestiya Akademii Nauk. Rossijskaya Akademiya Nauk. Seriya Fizicheskaya
- Journal Volume
- 64
- Journal Issue
- 4
- Journal Page Range
- p. 741-742
- ISSN
- 1026-3489
- CODEN
- IRAFEO
Conference
- Title
- 14. International conference on ion surface interaction
- Original Conference Title
- 14. Mezhdunarodnaya konferentsiya po vzaimodejstviyu ionov s poverkhnost'yu
- Dates
- 30 Aug - 4 Sep 1999
- Place
- Zvenigorod (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 32017655
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ARGON IONS; COMPARATIVE EVALUATIONS; ELECTRON SPECTRA; EV RANGE 10-100; ION IMPLANTATION; MATHEMATICAL MODELS; MOLYBDENUM SILICIDES; PHOTOELECTRON SPECTROSCOPY; SPUTTERING; TANTALUM SILICIDES; THRESHOLD ENERGY; VANADIUM SILICIDES
- Descriptors DEC
- CHARGED PARTICLES; ELECTRON SPECTROSCOPY; ENERGY; ENERGY RANGE; EV RANGE; EVALUATION; IONS; MOLYBDENUM COMPOUNDS; REFRACTORY METAL COMPOUNDS; SILICIDES; SILICON COMPOUNDS; SPECTRA; SPECTROSCOPY; TANTALUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; VANADIUM COMPOUNDS
Optional Information
- Notes
- 5 refs., 1 fig.