Determination of absolute selective sputtering coefficients in a hollow-cathode hydrogen plasma

A method is proposed for determining the absolute sputtering coefficients for the components of alloys in a hollow-cathode hydrogen plasma with sputtering particles having energies on the order of several hundred eV, based on the standard spectral-probe method used for determining the selective sputtering coefficients in plasmas of atomic gases. The distribution functions of the particles bombarding the surface of the hollow cathode are calculated. It is shown that the main contribution to sputtering under typical discharge conditions in a hollow cathode gas pressures of several torr, current densities of order 10 mA/cm2 is from H3 ions. 15 refs