Published 2000 | Version v1
Journal article

On a feature of the molecular effect for light ions in silicon

  • 1. Sankt-Peterburgskij Gosudarstvennyj Univ., Sankt-Peterburg (Russian Federation)

Description

One studied the molecular effect at accumulation of radiation damages during N1+ and N2+ nitrogen ion irradiated crystalline silicon that was preliminary partially disordered by Si+ ions under 20 deg C. It was revealed that in case when prior to nitrogen ion irradiation one heated the crystal under 250-350 deg C then the distributions in defect accumulation during the subsequent bombardment by N1+ and N2+ ions would disappear

Abstract (Russian)

Исследован молекулярный эффект при накоплении радиационных повреждений в процессе облучения ионами азота N1+ и N2+ кристаллического кремния, предварительно частично разупорядоченного ионами Si+ при 20 град. С. Обнаружено, что если перед облучением ионами азота кристалл прогреть при 250-350 град. С, то различия в накоплении дефектов при последующей бомбардировке ионами N1+ и N2+ исчезают

Additional details

Additional titles

Original title (Russian)
Об одной особенности молекулярного эффекта в кремнии для легких ионов

Publishing Information

Journal Title
Izvestiya Akademii Nauk. Rossijskaya Akademiya Nauk. Seriya Fizicheskaya
Journal Volume
64
Journal Issue
4
Journal Page Range
p. 716-720
ISSN
1026-3489
CODEN
IRAFEO

Conference

Title
14. International conference on ion surface interaction
Original Conference Title
14. Mezhdunarodnaya konferentsiya po vzaimodejstviyu ionov s poverkhnost'yu
Dates
30 Aug - 4 Sep 1999
Place
Zvenigorod (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
32017650
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
CRYSTALS; DEPTH; HEATING; ION IMPLANTATION; MOLECULAR IONS; NITROGEN IONS; PHYSICAL RADIATION EFFECTS; SILICON; SILICON IONS; SPATIAL DISTRIBUTION
Descriptors DEC
CHARGED PARTICLES; DIMENSIONS; DISTRIBUTION; ELEMENTS; IONS; RADIATION EFFECTS; SEMIMETALS

Optional Information

Notes
8 refs., 2 figs.