High-frequency Magnetic Properties of [Fe₈₀Ni₂₀-O/SiO₂]_n Multilayer Film Served as Magnetic Core of Solenoid Inductor

In this study, we report the significant enhancement of high-frequency performance of solenoid inductors incorporated [Fe₈₀Ni₂₀-O/SiO₂]_n magnetic multilayer film prepared by magnetron sputtering as magnetic core over their air-core counterparts. The integrated solenoid inductor with multilayered magnetic core revealed excellent high-frequency performance in a wide operation frequency range of 0-4 GHz, and acquired a peak inductance density of 72 nH/mm². Compared to their air-core solenoid inductors with equivalent geometry, there were more than 35-fold enhancement for inductance and 24-fold enhancement for peak quality factor of the 21-turn integrated solenoid inductor with multilayered magnetic core operating at 1.5 GHz. The results indicated that the multilayer magnetic core had promising prospect for applications in GHz frequency electromagnetic devices. (paper)