Charge exchange spectroscopy of multiply charged ions of industrial and astrophysical interest

Photon emission spectra have been measured in collisions of multiply charged ions with neutral target gases in keV collision energies. Extreme ultra-violet emission spectra of Xe and Sn ions have contributed to give the atomic data for the understanding of the light source plasmas for the next generation semiconductor lithography. And soft X-ray emission spectra of highly charged O ions have related to the solar wind charge exchange, and the results have been regarded as the useful data for the understanding the collisions of the solar wind ions with the neutral matter within the heliosphere