Interrelation between the properties of borophosphorosilicate glass layers and the conditions of their growth during chemical vapor deposition

Totality of experimental data on the properties of borophosphorosilicate glass (BPSG) layers synthesized from tetraethoxysilane, boric and phosphoric acid esters and ozone-oxygen mixture is analyzed. It is ascertained that growth of layers on the steps of substratum relief, surface roughness of coatings and carbon concentration in the glass correlate with the change in concentration of the initial doping esters during layer synthesis. A mechanism of BPSG layer growth including the routes of heterogeneous growth of silicon dioxide, homogeneous-heterogeneous growth of doped oxide layers, as well as the route of cluster formation from doping impurities in gaseous phase, is suggested