Published 1978 | Version v1
Miscellaneous

Determination of concentration profiles of As impurity atoms in silicon crystals from characteristic X radiation, induced by H+ and He+ ions

Description

no abstract available

Additional details

Additional titles

Original title (Russian)
Нахождение концентрационных профилей примесных атомов Ас в кристаллах кремния по характеристическомы рентгеновскому излучению, возбуждаемому ионами Х

Publishing Information

Imprint Title
Pre-conference program and summaries of reports of the 9. All-union conference on physics of charged particle and crystal interaction
Journal Page Range
p. 43.

Conference

Title
9. All-union conference on physics of charged particle and crystal interaction.
Dates
29 - 31 May 1978.
Place
Moscow, USSR.

INIS

Country of Publication
USSR
Country of Input or Organization
USSR
INIS RN
11500952
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, No Abstract, Non-conventional Literature
Descriptors DEI
ARSENIC ADDITIONS; CRYSTALS; ENERGY DEPENDENCE; HELIUM IONS; HYDROGEN IONS; ION IMPLANTATION; MEV RANGE 01-10; NUMERICAL SOLUTION; SILICON; SPATIAL DISTRIBUTION; X RADIATION
Descriptors DEC
CHARGED PARTICLES; DISTRIBUTION; ELECTROMAGNETIC RADIATION; ELEMENTS; ENERGY RANGE; IONIZING RADIATIONS; IONS; MEV RANGE; RADIATIONS; SEMIMETALS

Optional Information

Notes
3 refs.; short note. Imprint:Predvaritel'naya programma i tezisy dokladov 9. Vsesoyuznogo soveshchaniya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami.