Germanium structure defects at He and H ion irradiation

Methods of electron microscopy have been used to investigate structure of germanium alloys irradiated with helium and hydrogen ions in a wide range of ion energies and temperatures of succeeding annealing. It is shown that accumulations of interstitials of rod-like and (113)-defects are the main type of defects in germanium layers irradiated with helium ions. Annealing of these layers results both in decrease of dimensions of the mentioned defects and in their transformation into dislocation loops. The results of study on structural changes and determination of electrophysical properties of irradiated layers bring about the conclusion that decrease of dimensions of rod defects and (113)-defects takes place at the expense of interstitial generation into the crystal volume. Differences in the structure of layers irradiated by helium and hydrogen ions are conditioned by different mechanisms of atom interaction of the introduced impurity with radiation point defects