Multi-parameter optimization of electrostatic micro-generators using design optimization algorithms

In this paper, the design of an electrostatic micro-generator with an in-plane area-overlap architecture is optimized in a six-dimensional parameter space using multi-parameter optimization algorithms. A parametric model is presented including four geometric and two electrical parameters. The constraints of the design parameters are discussed. The design optimization is carried out in modeFRONTIER using a genetic algorithm. The results show that the displacement limit and the number of electrode elements are essential parameters, which require optimization in the design process. The other parameters take values at the upper or lower bound of their design space. The results also demonstrate that a maximized power output will not be achieved by maximizing the capacitance change per unit displacement