Microspot target development with seeded and patterned plasma polymers

A new class of targets for laser fusion experiments was fabricated using plasma-deposition and etching technology. Plasma polymer coatings seeded with silicon or sulfur were deposited as 300μm diameter microspots inside holes of equal diameter in a pure hydrocarbon polymer film. The target was designed to study large-scale plasma instabilities and measure the temperature and density histories of laser induced plasmas. The microspot target required three new development: freestanding stress-free CH films, technology to define and form holes in CH films, and development of seeded films deposited as 300μm diameter discs, nested tightly in the precision holes. Hydrocarbon films were deposited by plasma polymerization or by solution casting (polystyrene in dichloromethane) onto potassium-chloide-coated glass slides. Holes were defined either by masking with a 300μm diameter disc or by reactive ion etching through a washer mask. Sulfur or silicon seeded CH polymer microspots were deposited through a mask using plasma polymerization. Seeded polymer films were prepared with compositions as high as 12 atomic percent, with most diagnostic targets made with 2 a/o. Silicon seeded polymers, when deposited at 750 mtorr (100 Pa) pressure, wer transparent and colorless