Characterization of optical UV filters using Rutherford backscattering spectroscopy

Rutherford backscattering spectroscopy (RBS) has been used during the development of multilayer thin film optical filters, especially designed for the fluorescence detector of the Pierre AUGER Project. Depth profiles of the heavy components have been measured directly, while reliable results for the light components could also be extracted indirectly. Relative thickness and density of the individual layers and deviations from the desired thickness and stoichiometry have been deduced. The findings of the RBS method have been compared and discussed with results obtained by other characterization techniques