Published July 1987
| Version v1
Journal article
Experiment on first-wall carbon coating: Focusing hydrogen concentration
Description
As a back-up experiment for investigations on first-wall carbon coatings of toroidal machines, we constructed the RIKEN ECR-2 device and carried out simulation experiments. By electron cyclotron resonance discharges we obtain an amorphous, hard, and dense carbon film. It is possible to decrease the atomic H/C ratio of carbon films by high-energy ion bombardment. Harmful carbon films deposited on observation windows can be cleaned up by a local pure hydrogen plasma
Additional details
Publishing Information
- Journal Title
- J. Vac. Sci. Technol., A
- Journal Volume
- 5
- Journal Issue
- 4
- Series
- J. Vac. Sci. Technol., A.
- Journal Page Range
- 2297-2300
- ISSN
- 0734-2101
- CODEN
- JVTAD
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 18077848
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY; S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Descriptors DEI
- CARBON; COATINGS; DEPOSITION; FIRST WALL; FOCUSING; HARDNESS; HYDROGEN; IMPURITIES; MATERIALS; SIMULATION; SURFACE COATING; TOKAMAK DEVICES
- Descriptors DEC
- CLOSED PLASMA DEVICES; ELEMENTS; MECHANICAL PROPERTIES; NONMETALS; THERMONUCLEAR DEVICES; THERMONUCLEAR REACTOR WALLS