Inert gas handling in ion plating systems

The results of an investigation into the best methods for production and monitoring of the inert gas environment for ion plating systems are reported. Work carried out on Pirani gauges and high pressure ion gauges for the measurement of pressures in the ion plating region (1 - 50mtorr) and the use of furnaces for cleaning argon is outlined. A schematic of a gas handling system is shown and discussed. (UK)