Structural study of amorphous In2O3 film by grazing incidence X-ray scattering (GIXS) with synchrotron radiation
Creators
- 1. Institute of Industrial Science, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505 (Japan)
- 2. United Nation University, 5-53-70 Gingumae, Shibuya-ku, Tokyo 150-8925 (Japan)
- 3. Idemitsu Kosan, Co., Ltd., 1280 Kamiizumi, Sodegaura-shi, Chiba 299-0293 (Japan)
- 4. Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1 Kouto, Mikazuki-cho, Sayo-gun, Hyogo 679-5198 (Japan)
Description
Grazing incidence X-ray scattering (GIXS) using synchrotron radiation is a very useful method for structural analysis of amorphous films. We investigated the structure of amorphous In2O3 film utilizing GIXS at BL19B2 in SPring-8. Radial distribution function (RDF) was obtained from the measurement data. Structural models were constructed by molecular dynamics (MD) and reverse Monte-Carlo (RMC) simulations, and the calculated RDFs from the simulations were compared with that observed. It was found that the average oxygen coordination number around In ions was almost 6 and the average length 2.12 A, which was smaller by about 3% than that of 2.18 A in crystalline In2O3. It was concluded that the atomic arrangement of the amorphous In2O3 was characterized by the increase in the number and the boarder angle of distribution of corner-sharing In-O-In bond compared with crystalline In2O3
Additional details
Identifiers
- DOI
- 10.1016/j.tsf.2005.08.256;
- PII
- S0040-6090(05)01505-1;
Publishing Information
- Journal Title
- Thin Solid Films
- Journal Volume
- 496
- Journal Issue
- 1
- Journal Page Range
- p. 95-98
- ISSN
- 0040-6090
- CODEN
- THSFAP
Conference
- Title
- 4. international symposium on transparent oxide thin films for electronics and optics
- Acronym
- TOEO-4
- Dates
- 7-8 Apr 2005
- Place
- Tokyo (Japan)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37109833
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- COORDINATION NUMBER; FILMS; INDIUM IONS; INDIUM OXIDES; MOLECULAR DYNAMICS METHOD; MONTE CARLO METHOD; SIMULATION; SPATIAL DISTRIBUTION; SPRING-8 STORAGE RING; STRUCTURAL MODELS; SYNCHROTRON RADIATION; X-RAY DIFFRACTION
- Descriptors DEC
- BREMSSTRAHLUNG; CALCULATION METHODS; CHALCOGENIDES; CHARGED PARTICLES; COHERENT SCATTERING; DIFFRACTION; DISTRIBUTION; ELECTROMAGNETIC RADIATION; INDIUM COMPOUNDS; IONS; OXIDES; OXYGEN COMPOUNDS; RADIATION SOURCES; RADIATIONS; SCATTERING; STORAGE RINGS; SYNCHROTRON RADIATION SOURCES
Optional Information
- Copyright
- Copyright (c) 2005 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.