Published 1999 | Version v1
Miscellaneous Open

Cathodic arc deposition of nitrogen doped tetrahedral amorphous carbon for computer memories

  • 1. University of Sydney, NSW (Australia). School of Physics

Description

Much interest has been shown in the use of tetrahedral amorphous carbon (ta-C) deposited by filtered cathodic arc as an inexpensive, easily produced, wide band-gap semiconductor in the fabrication of electronic devices. Around the world much of this interest has been in its potential use as a low electron-affinity field emitter for flat-screen displays. Recent observations of a nonvolatile memory effect in nitrogen doped ta-C at the University of Sydney suggest that new possibilities may exist for its use as a means of non-volatile digital information storage. Devices with switching times of 100 μs, read times of 100 ns, and effective memory retention times of the order of months have been fabricated. Nonvolatile memory phenomena observed in the electrical characteristics of nitrogen doped ta-C thin films suggests such traps may be useful as a means of digital information storage

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Part of:
The 22nd AINSE plasma science and technology conference. Conference handbook

Additional details

Publishing Information

Imprint Place
Lucas Heights (Australia)
Imprint Title
The 22nd AINSE plasma science and technology conference. Conference handbook
Imprint Pagination
133 p.
Journal Page Range
p. 51-52
Report number
INIS-AU--0045

Conference

Title
22. AINSE plasma science and technology conference. Plasma'99
Dates
8-9 Feb 1999
Place
Canberra (Australia)

INIS

Country of Publication
Australia
Country of Input or Organization
Australia
INIS RN
31033822
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY; S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference, Numerical Data
Descriptors DEI
AMORPHOUS STATE; CARBON; EXPERIMENTAL DATA; HYSTERESIS; ION IMPLANTATION; MEMORY DEVICES; NITROGEN IONS; SEMICONDUCTOR MATERIALS; THIN FILMS
Descriptors DEC
CHARGED PARTICLES; DATA; ELEMENTS; FILMS; INFORMATION; IONS; MATERIALS; NONMETALS; NUMERICAL DATA

Optional Information

Notes
Extended abstract. 6 refs., 3 figs.