Published June 1993 | Version v1
Journal article Metadata-only

A heavy ion microprobe and its application to multi-dimensional processing and analysis

Creators

  • 1. Government Industrial Research Inst. Osaka (GIRIO), Ikeda (Japan)

Description

The development of a heavy ion microprobe system and its applications are being studied at GIRIO. The minimum beam spot size of 3 μm x 3 μm was achieved for various ions with energies in the range of 0.4-6 MeV by a focusing system which is combined with a tandem-type accelerator. This system allows us to perform microprocesses such as maskless MeV ion implantation and microanalysis using heavy ion microprobes. Some applications of the heavy ion microprobe are presented. (orig.)

Additional details

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
79
Journal Issue
1-4
Journal Page Range
p. 424-427.
ISSN
0168-583X
CODEN
NIMBEU

Conference

Title
12. international conference on the application of accelerators in research and industry.
Dates
2-5 Nov 1992.
Place
Denton, TX (United States).

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
25010390
Subject category
S43: PARTICLE ACCELERATORS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
BACKSCATTERING; BEAM TRANSPORT; DATA ACQUISITION SYSTEMS; DATA PROCESSING; FOCUSING; GOLD IONS; HEAVY ION ACCELERATORS; ION BEAMS; ION IMPLANTATION; ION MICROPROBE ANALYSIS; ION PROBES; KEV RANGE 100-1000; LEAKAGE CURRENT; MANY-DIMENSIONAL CALCULATIONS; MEV RANGE 01-10; NITROGEN IONS; RUTHERFORD SCATTERING; SILICON NITRIDES; TANDEM ELECTROSTATIC ACCELERATORS
Descriptors DEC
ACCELERATORS; BEAMS; CHARGED PARTICLES; CHEMICAL ANALYSIS; CURRENTS; ELASTIC SCATTERING; ELECTRIC CURRENTS; ELECTROSTATIC ACCELERATORS; ENERGY RANGE; IONS; KEV RANGE; MEV RANGE; MICROANALYSIS; NITRIDES; NITROGEN COMPOUNDS; NONDESTRUCTIVE ANALYSIS; PNICTIDES; PROBES; SCATTERING; SILICON COMPOUNDS