Published 2020 | Version v1
Book Metadata-only

Studying the properties of nanosized structures created on the surface of a free Si/Cu film system

Creators

  • 1. Inst. Ionno-Plazmennykh i Lazernykh Tekhnologij, Tashkent (Uzbekistan)
  • 2. Tashkentskij Univ. Informatsionnykh Tekhnologij Respubliki Uzbekistan, Tashkent (Uzbekistan)

Description

The low-energy (E0=1–5 keV) implantation of O2+, Ba+, Cu+ and Co+ ions followed by annealing on the surface of a free Si/Cu (100) nanofilms system yielded nanophases and films of SiO2 and metal silicides. Their surface morphology, composition, parameters, of energy zones, the maximum value of the secondary electron emission coefficient and the quantum yield of photoelectrons are determined. In particular, it was shown that the band gap of metal silicides is 0.3–0.4 eV, and their resistivity is 100–500 μOhm·cm

Abstract (Russian)

Методом низкоэнергетической (Е0=1-5 кэВ) имплантации ионов О2+, Ва+, Cu+ и Со+ с последующим отжигом на поверхности свободной нанопленочной системы Si/Cu(100) получены нанофазы и пленки SiO2 и силицидов металлов. Определены их морфология поверхности, состав, параметры энергетических зон, максимальное значение коэффициента вторичной электронной эмиссии, квантовый выход фотоэлектронов. В частности показано, что щирина запрещенной зоны силицидов металлов составляет 0.3-0.4 эВ, а их удельное сопротивление - 100-500 мкОм·см
Part of:
VI International conference «Laser, plasma research and technologies – LaPlaz-2020». Collection of scientific papers. Part 1

Additional details

Additional titles

Original title (Russian)
Изучение свойства наноразмерных структур, созданных на поверхности свободной пленочной системы Си/Cу

Publishing Information

Publisher
NIYaU MIFI
Imprint Place
Moscow (Russian Federation)
ISBN
978-5-7262-2655-2
Imprint Title
VI International conference #Left-Pointing Double Angle Quotation Mark#Laser, plasma research and technologies #En Dash# LaPlaz-2020#Right-Pointing Double Angle Quotation Mark#. Collection of scientific papers. Part 1
Imprint Pagination
463 p.
Journal Page Range
p. 204-205

Conference

Title
International Conference on Laser, Plasma Research and Technologies
Original Conference Title
VI Mezhdunarodnaya konferentsiya «Lazernye, plazmennye issledovaniya i tekhnologii – LaPlaz-2020»
Acronym
LaPlas 2020
Dates
11-14 Feb 2020
Place
Moscow (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
53056582
Subject category
S77: NANOSCIENCE AND NANOTECHNOLOGY;
Resource subtype / Literary indicator
Conference, Numerical Data
Descriptors DEI
ANNEALING; BARIUM COMPOUNDS; COBALT SILICIDES; COPPER SILICIDES; ELECTRIC CONDUCTIVITY; ELECTRON EMISSION; ELECTRONIC STRUCTURE; ENERGY SPECTRA; ENERGY-LOSS SPECTROSCOPY; EXPERIMENTAL DATA; ION IMPLANTATION; NANOFILMS; NANOSTRUCTURES; SECONDARY EMISSION; SILICON OXIDES; THICKNESS
Descriptors DEC
ALKALINE EARTH METAL COMPOUNDS; CHALCOGENIDES; COBALT COMPOUNDS; COPPER COMPOUNDS; DATA; DIMENSIONS; ELECTRICAL PROPERTIES; ELECTRON SPECTROSCOPY; EMISSION; FILMS; HEAT TREATMENTS; INFORMATION; MATERIALS; NANOMATERIALS; NUMERICAL DATA; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SILICIDES; SILICON COMPOUNDS; SPECTRA; SPECTROSCOPY; THIN FILMS; TRANSITION ELEMENT COMPOUNDS

Optional Information

Notes
1 fig. Imprint:VI Mezhdunarodnaya konferentsiya #Left-Pointing Double Angle Quotation Mark#Lazernye, plazmennye issledovaniya i tekhnologii #En Dash# LaPlaz-2020#Right-Pointing Double Angle Quotation Mark#. Sbornik nauchnykh trudov. Chast' 1