Published November 1990 | Version v1
Journal article Metadata-only

Formation of multicomponent metalloxide thin films by reactive ion-beam sputtering

Creators

  • 1. AN Belorusskoj SSR, Minsk (Belarus). Inst. Fiziki Tverdogo Tela i Poluprovodnikov

Description

The process of SrTiO3,BaTiO3 and Y3F5O12 film formation through sputtering the targets made of the mixtures of corresponding oxide and carbonate powders in oxygen by 1.2 keV oxygen ion beam is studied. The composition of the targets and parameters of their sputtering are determined for producing homogeneous in thickness (60-300 nm) films of stoichiometric composition over the area of 80 cm2 maximum. Electrophysical characteristics of films are given

Additional details

Additional titles

Original title (Russian)
Формирование тонких пленок многокомпонентных металлоксидов методом реактивного ионно-лучевого распыления

Publishing Information

Journal Title
Pis'ma v Zhurnal Tekhnicheskoj Fiziki
Journal Volume
16
Journal Issue
21
Series
Pis'ma Zh. Tekh. Fiz.
Journal Page Range
65-69
ISSN
0320-0116
CODEN
PZTFD

INIS

Country of Publication
Russian Federation
Country of Input or Organization
USSR
INIS RN
23073846
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
BARIUM COMPOUNDS; CHEMICAL COMPOSITION; FERRITE GARNETS; KEV RANGE 01-10; OXYGEN IONS; SILICON; SPUTTERING; STOICHIOMETRY; STRONTIUM COMPOUNDS; SUBSTRATES; THIN FILMS; TITANATES; YTTRIUM COMPOUNDS
Descriptors DEC
ALKALINE EARTH METAL COMPOUNDS; CHARGED PARTICLES; ELEMENTS; ENERGY RANGE; FILMS; IONS; KEV RANGE; MINERALS; OXIDE MINERALS; OXYGEN COMPOUNDS; SEMIMETALS; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS