Published January 1990
| Version v1
Journal article
A 500 keV ion beam accelerator for microbeam formation
Creators
- 1. ULVAC, Japan Ltd., Kanagawa (Japan)
- 2. Faculty of Engineering Science and Research Center for Extreme Materials, Osaka Univ. (Japan)
Description
A 500 keV ion accelerator with a Disktron high-voltage generator has been developed for RBS analysis with microbeam and ion beam modification. An accelerating voltage stability of better than 4.5x10-4, with a long-term (≅ 1 h) current stability of better than 3%, was obtained for both proton and helium ions at 400 keV. The short-term (≅ ms) current stability, which is very important for RBS mapping measurements, was found to be better than 2x10-3. The X-ray dose rate around the accelerator was less than 0.03 mR/h at maximum with an acceleration of helium ions of 40 μA at an energy of 500 keV. (orig.)
Additional details
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research, Section B
- Journal Volume
- 45
- Journal Issue
- 1-4
- Series
- Nucl. Instrum. Methods Phys. Res., Sect. B.
- Journal Page Range
- 540-542
- ISSN
- 0168-583X
- CODEN
- NIMBE
Conference
- Title
- 9. international conference on ion beam analysis (IBA-9).
- Dates
- 26-30 Jun 1989.
- Place
- Kingston (Canada).
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 21071720
- Subject category
- S43: PARTICLE ACCELERATORS;
- Resource subtype / Literary indicator
- Conference, Numerical Data
- Descriptors DEI
- ACCELERATORS; BACKSCATTERING; EXPERIMENTAL DATA; HELIUM IONS; ION BEAMS; ION IMPLANTATION; KEV RANGE 100-1000; PROTONS; RADIATION DOSES; RUTHERFORD SCATTERING; STABILITY; X RADIATION
- Descriptors DEC
- BARYONS; BEAMS; CATIONS; CHARGED PARTICLES; DATA; ELASTIC SCATTERING; ELECTROMAGNETIC RADIATION; ELEMENTARY PARTICLES; ENERGY RANGE; FERMIONS; HADRONS; HYDROGEN IONS; HYDROGEN IONS 1 PLUS; INFORMATION; IONIZING RADIATIONS; IONS; KEV RANGE; NUCLEONS; NUMERICAL DATA; RADIATIONS; SCATTERING