Published April 1980 | Version v1
Report Metadata-only

Sputtering: theory-modelling

Creators

  • 1. Sandia Labs., Livermore, CA

Description

no abstract available

Additional details

Publishing Information

Imprint Title
Proceedings of the workshop on sputtering caused by plasma (neutral beam) surface interaction
Journal Page Range
p. 14.1-14.29.
Report number
CONF-790775--

Conference

Title
Workshop on sputtering caused by plasma (neutral beam) surface interactions.
Dates
9 - 10 Jul 1979.
Place
Argonne, IL, USA.

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
11553692
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
BOLTZMANN EQUATION; COMPUTERIZED SIMULATION; MATHEMATICAL MODELS; MONTE CARLO METHOD; SPUTTERING; TRANSPORT THEORY
Descriptors DEC
DIFFERENTIAL EQUATIONS; EQUATIONS; SIMULATION

Optional Information

Notes
Imprint:Published in summary form only.