Published July 1989 | Version v1
Journal article Metadata-only

The Adone wiggler x-ray lithography beamline

Creators

  • 1. Consiglio Nazionale delle Ricerche and Istituto Nazionale di Fisica Nucleare-Laboratori Nazionali di Frascati, 00044 Frascati, Italy (Italy)
  • 2. Istituto Nazionale di Fisica Nucleare-Laboratori Nazionali di Frascati, 00044 Frascati, Italy
  • 3. Dipartimento di Energetica, Prima Universita' di Roma ''La Sapienza'', Roma, Italy
  • 4. University of Science and Technology of China, Hefei, China

Description

A soft x-ray beamline, utilizing the radiation produced by the six-pole wiggler of the Adone storage ring, has been realized. The beamline allows the exposure of large area resists by means of a double-mirror scanning system or mechanically moving the wafer. The mechanical, geometrical, and spectral characteristics of the beamline will be described

Additional details

Publishing Information

Journal Title
Review of Scientific Instruments
Journal Volume
60
Journal Issue
7
Series
Rev. Sci. Instrum.
Journal Page Range
2133-2136
ISSN
0034-6748
CODEN
RSINA

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
20085599
Subject category
S43: PARTICLE ACCELERATORS;
Descriptors DEI
ADONE; MECHANICAL PROPERTIES; PHOTON BEAMS; SPECIFICATIONS; STORAGE RINGS; SYNCHROTRON RADIATION; SYNCHROTRON RADIATION SOURCES; USES; WIGGLER MAGNETS; X-RAY SOURCES
Descriptors DEC
BEAMS; BREMSSTRAHLUNG; ELECTROMAGNETIC RADIATION; EQUIPMENT; MAGNETS; RADIATION SOURCES; RADIATIONS