Published February 2005
| Version v1
Journal article
Longitudinal emission diagnostics of plasma channel in rf barrier torch discharge
Creators
- 1. Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 611 37 Brno (Czech Republic)
Description
We present longitudinal emission diagnostics of the plasma channel in the spectral design of the plasma pencil - rf barrier torch discharge. This configuration has been developed for deposition of thin films on various surfaces. Using optical emission spectroscopy the spectroscopic quantities were determined as well as the longitudinal distribution of rotational temperature in the plasma channel is presented (Authors)
Additional details
Publishing Information
- Journal Title
- Acta Physica Slovaca
- Journal Volume
- 55
- Journal Issue
- 6
- Journal Page Range
- p. 573-576
- ISSN
- 0323-0465
- CODEN
- APSVCO
INIS
- Country of Publication
- Slovakia
- Country of Input or Organization
- Slovakia
- INIS RN
- 37077923
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Descriptors DEI
- ARCHAEOLOGICAL SPECIMENS; ATMOSPHERIC PRESSURE; DESIGN; NOZZLES; PLASMA DIAGNOSTICS; SURFACE CLEANING; SURFACE COATING; SURFACE TREATMENTS; THIN FILMS
- Descriptors DEC
- CLEANING; DEPOSITION; FILMS; SURFACE FINISHING
Optional Information
- Contract/Grant/Project number
- Grants 202/05/0777; 202/03/-0011; MSM0021422411
- Notes
- 12 refs., 3 figs.