Published January 17, 2005
| Version v1
Journal article
Ablation of organic polymers by 46.9-nm-laser radiation
Creators
- Juha, L.1, 2, 3, 4
- Bittner, M.1, 2, 3, 4
- Chvostova, D.1, 2, 3, 4
- Krasa, J.1, 2, 3, 4
- Otcenasek, Z.1, 2, 3, 4
- Praeg, A.R.1, 2, 3, 4
- Ullschmied, J.1, 2, 3, 4
- Pientka, Z.1, 2, 3, 4
- Krzywinski, J.1, 2, 3, 4
- Pelka, J. B.1, 2, 3, 4
- Wawro, A.1, 2, 3, 4
- Grisham, M.E.1, 2, 3, 4
- Vaschenko, G.1, 2, 3, 4
- Menoni, C.S.1, 2, 3, 4
- Rocca, J.J.1, 2, 3, 4
- 1. NSF ERC for Extreme Ultraviolet Science and Technology and Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, Colorado 80523 (United States)
- 2. Institute of Physics, Polish Academy of Sciences, Al. Lotnikow 32/46, PL-02-668 Warsaw (Poland)
- 3. Institute of Macromolecular Chemistry, Czech Academy of Sciences, Heyrovskeho nam. 2, 162 06 Prague 6 (Czech Republic)
- 4. Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 21 Prague 8 (Czech Republic)
Description
We report results of the exposure of poly(tetrafluoroethylene) -(PTFE), poly(methyl methacrylate) -(PMMA), and polyimide -(PI) to intense 46.9-nm-laser pulses of 1.2-ns-duration at fluences ranging from ∼0.1 to ∼10 J/cm2. The ablation rates were found to be similar for all three materials, ∼80-90 nm/pulse at 1 J/cm2. The results suggest that the ablation of organic polymers induced by intense extreme ultraviolet laser radiation differs from that corresponding to irradiation with longer wavelengths
Additional details
Identifiers
- DOI
- 10.1063/1.1854741;
Publishing Information
- Journal Title
- Applied Physics Letters
- Journal Volume
- 86
- Journal Issue
- 3
- Journal Page Range
- p. 034109-034109.3
- ISSN
- 0003-6951
- CODEN
- APPLAB
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 36080322
- Subject category
- S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; S36: MATERIALS SCIENCE;
- Descriptors DEI
- ABLATION; EXTREME ULTRAVIOLET RADIATION; LASER RADIATION; LASERS; METHACRYLIC ACID ESTERS; PMMA; POLYTETRAFLUOROETHYLENE; PULSES; WAVELENGTHS
- Descriptors DEC
- CARBOXYLIC ACID ESTERS; ELECTROMAGNETIC RADIATION; ESTERS; FLUORINATED ALIPHATIC HYDROCARBONS; HALOGENATED ALIPHATIC HYDROCARBONS; ORGANIC COMPOUNDS; ORGANIC FLUORINE COMPOUNDS; ORGANIC HALOGEN COMPOUNDS; ORGANIC POLYMERS; POLYACRYLATES; POLYETHYLENES; POLYMERS; POLYOLEFINS; POLYVINYLS; RADIATIONS; ULTRAVIOLET RADIATION
Optional Information
- Notes
- (c) 2005 American Institute of Physics