Published July 1, 2019 | Version v1
Journal article Metadata-only

Ion-vacuum technology for manufacturing elements for nanogradient optics and metamaterials

Creators

  • 1. Fotron-Auto Scientific-Manufacture Enterprise, Ltd., Moscow, 115191 (Russian Federation)
  • 2. Igor Sikorsky Kyiv Polytechnic Institute, Kiev, 03056 (Ukraine)
  • 3. Scientific and technological centre of unique instrument-making of RAS, Moscow, 117342 (Russian Federation)

Description

The technology and the automated ion-plasma vacuum equipment for the manufacture of thin film elements for nanogradient optics and metamaterials by the method of physico-chemical synthesis of coatings from oxides and nitrides is presented. The technology is based on the mid-frequency pulse magnetron ion sputtering of two solid metal targets with ion bombardment of substrates and high-frequency induction-plasma activation of reaction gases. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1742-6596/1281/1/012090

Additional details

Identifiers

DOI
10.1088/1742-6596/1281/1/012090;

Publishing Information

Journal Title
Journal of Physics. Conference Series (Online)
Journal Volume
1281
Journal Issue
1
Journal Page Range
[4 p.]
ISSN
1742-6596

Conference

Title
14. International Conference on Films and Coatings
Dates
14-16 May 2019
Place
Saint Petersburg (Russian Federation)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
53043249
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY; S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
COATINGS; ION BEAMS; MAGNETRONS; METALS; METAMATERIALS; NITRIDES; OPTICS; OXIDES; PLASMA; PULSES; SOLIDS; SUBSTRATES; THIN FILMS
Descriptors DEC
BEAMS; CHALCOGENIDES; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; FILMS; MATERIALS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; NITROGEN COMPOUNDS; OXYGEN COMPOUNDS; PNICTIDES