Characterization of a plasma jet produced by a vacuum discharge for diamond deposition
Creators
- 1. Centro Tecnico Aeroespacial, Sao Jose dos Campos, SP (Brazil). Inst. Tecnologico de Aeronautica
- 2. Instituto Nacional de Pesquisas Espaciais, Sao Jose dos Campos, SP (Brazil). Lab. Associado de Plasma
Description
The results of the measurements to determine the best conditions for diamond synthesis, in an arc jet apparatus, PJET, that has been developed at LAP/INPE are discussed. The arc jet can be operated at a maximum of 3 k W of electric power with argon, hydrogen and methane as working gases at a total pressure of about 100 Torr. The plasma density and electron temperature were measured by a double electrostatic probe scanning along the axis of the plasma jet for different power and gas fluxes. The cathode and substrate temperature were also measured using a pyrometer and a thermocouple, respectively. The highest values obtained at PJET were: Te ∼ 0.5 eV, ne ∼ 1018 m-3, cathode temperature ∼ 8000 C and substrate temperature ∼ 10000 C.(author). 6 refs, 5 figs
Additional details
Publishing Information
- Imprint Title
- Proceedings of the 1994 International Conference on Plasma Physics; 6 Latin American Workshop on Plasma Physics. v. 3
- Imprint Pagination
- 443 p.
- Journal Page Range
- p. 261-264.
Conference
- Title
- 1994 International Conference on Plasma Physics; 6. Latin American Workshop on Plasma Physics; 10. Kiev International Conference on Plasma Theory; 10. International Congress on Waves and Instabilities in Plasmas.
- Dates
- 31 Oct - 4 Nov 1994.
- Place
- Foz do Iguacu, PR (Brazil).
INIS
- Country of Publication
- Brazil
- Country of Input or Organization
- Brazil
- INIS RN
- 26078817
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference, Non-conventional Literature
- Descriptors DEI
- ARGON; DIAMONDS; ELECTRON TEMPERATURE; ELECTRONS; ENERGY; HYDROGEN; IONIZED GASES; METHANE; PLASMA; PLASMA ARC SPRAYING; PLASMA DENSITY; PLASMA JETS
- Descriptors DEC
- ALKANES; CARBON; DEPOSITION; ELEMENTARY PARTICLES; ELEMENTS; FERMIONS; FLUIDS; GASES; HYDROCARBONS; LEPTONS; MINERALS; NONMETALS; ORGANIC COMPOUNDS; RARE GASES; SPRAY COATING; SURFACE COATING