Deposition of Epitaxial YBCO Films on LaAlO3(100) Substrate by Spray Pyrolysis Method

YBa2Cu3Oy superconducting films were prepared on LaAlO3(100) single crystal substrate by spray pyrolysis method. The precursor solution was prepared by dissolving nitrate powders in de-ionized water. Both of ultrasonic and concentric nebulizers were used in order to generate fine droplets of precursor solution. C-axis oriented films were obtained at deposition temperature of 750 - 850 degree C and working pressure of 100 Torr and 500 Torr. In case of ultrasonic nebulizer, films showed rough and porous surface morphology due to formation of enormous droplets, while smooth and dense films were obtained for concentric nebulizer. A transport Jc value of 0.43 MA/cm2 at 77 K and self field was achieved on LaAlO3(100) single crystal substrate.