Superconducting dc characteristics of meander lines made by 10B enriched MgB2 thin films

We report on fabrication and superconducting dc characteristics of meander lines made by 10B-enriched MgB2 thin films. The MgB2 thin films were prepared by a multiple targets sputtering system. To improve the superconductivity of MgB2 thin films, we used a 10B-rich (97.0%) target. The films on Al2O3 substrates showed excellent properties: TC of 29.2 K, resistivity at 40 K of 68 μΩ cm, and RRR of 1.22. The MgB2 meander lines with SiO protect layer and Al electrodes were fabricated by e-beam lithography and conventional etching and deposition techniques. The meander line width was 1.0 μm and the total length reached 47.3 cm. The dc characteristics measurements showed that the superconducting dc characteristics of fabricated MgB2 meander lines were almost the same with the unprocessed film