Published 2021 | Version v1
Book

The behavior of sputtering coefficient under sliding ion incidence on target

  • 1. Rossijskij Novyj Univ., Moscow (Russian Federation)
  • 2. Univ. Kalabrii, Kozentsa (Italy)

Description

no abstract available

Part of:
Summaries of reports of 50th International Tulinov conference on physics of interactions of charged particles with crystals (dedicated to the memory of Mikhail Igorevich Panasyuk)

Additional details

Additional titles

Original title (Russian)
Поведение коэффициента распыления при скользящем падении ионов на мишень

Publishing Information

Publisher
KDU, Universitetskaya Kniga
Imprint Place
Moscow (Russian Federation)
ISBN
978-5-91304-958-2
Imprint Title
Summaries of reports of 50th International Tulinov conference on physics of interactions of charged particles with crystals (dedicated to the memory of Mikhail Igorevich Panasyuk)
Imprint Pagination
200 p.
Journal Page Range
p. 45

Conference

Title
50. International Tulinov conference on physics of interactions of charged particles with crystals
Original Conference Title
50-ya mezhdunarodnaya Tulinovskaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
Dates
25-27 May 2021
Place
Moscow (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
55076346
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
No Abstract, Conference, Numerical Data
Descriptors DEI
ANGULAR DISTRIBUTION; COMPUTERIZED SIMULATION; ENERGY DEPENDENCE; INCIDENCE ANGLE; ION BEAMS; LIGHT IONS; MASS NUMBER; P CODES; SPUTTERING; TARGETS; THEORETICAL DATA
Descriptors DEC
BEAMS; CHARGED PARTICLES; COMPUTER CODES; DATA; DISTRIBUTION; INFORMATION; IONS; NUMERICAL DATA; SIMULATION

Optional Information

Notes
4 refs. Imprint:Tezisy dokladov 50-j mezhdunarodnoj Tulinovskoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami (pamyati Mikhaila Igorevicha Panasyuka posvyashchaetsya)