Published August 1974 | Version v1
Journal article Metadata-only

Mass spectroscopy of sputtered neutrals and its application for surface analysis

Creators

  • 1. Wuerzburg Univ. (F.R. Germany). Physikalisches Inst.

Description

no abstract available

Additional details

Identifiers

DOI
10.1016/0039-6028(74)90132-0;

Publishing Information

Journal Title
Surface Science
Journal Volume
44
Journal Issue
2
Series
Surf. Sci.
Journal Page Range
480-488
ISSN
0039-6028

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
6157326
Subject category
S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
Descriptors DEI
ARGON IONS; CHEMICAL ANALYSIS; ION BEAMS; MASS SPECTRA; MASS SPECTROSCOPY; METALS; NEUTRAL PARTICLES; POLYCRYSTALS; SPUTTERING; SURFACES; TARGETS
Descriptors DEC
BEAMS; CHARGED PARTICLES; CRYSTALS; ELEMENTS; IONS; SPECTRA; SPECTROSCOPY

Optional Information

Notes
Updated automatically by Metadata and Full-Text Enrichment Agent