Published December 1, 2018 | Version v1
Journal article

Influence of well doping on the performance of UTBB MOSFETs

  • 1. College of Physics and Information Engineering, Fuzhou University, Fuzhou 350108 (China)
  • 2. Institute of Microelectronics, Peking University, Beijing 100871 (China)

Description

In this work, the impact of well doping and corresponding body bias on UTBB MOSFETs is investigated. The ability of threshold voltage adjustment is evaluated. The results indicate that well doping can change the threshold voltage both of the N and P channel UTBB MOSFETs. The maximum amplitude for a typical 26 nm gate length device is about 100 mV, and these correspond to the cases of devices with an inverse type of high concentration dopant. The body bias adjusts the threshold voltage at a rate of 100–140 mV/V for the UTBB MOSFETs with a well. By optimizing well doping and body biasing, multi-threshold-voltage UTBB MOSFETs can be designed and optimized for lower power application. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1674-4926/39/12/124005

Additional details

Publishing Information

Journal Title
Journal of Semiconductors
Journal Volume
39
Journal Issue
12
Journal Page Range
[5 p.]
ISSN
1674-4926

INIS

Country of Publication
China
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
51067401
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
ABUNDANCE; AMPLITUDES; CONCENTRATION RATIO; DESIGN; DOPED MATERIALS; ELECTRIC POTENTIAL; EQUIPMENT; MOSFET; OPTIMIZATION
Descriptors DEC
DIMENSIONLESS NUMBERS; FIELD EFFECT TRANSISTORS; MATERIALS; MOS TRANSISTORS; SEMICONDUCTOR DEVICES; TRANSISTORS