Topographies of plasma-hardened surfaces of poly(dimethylsiloxane)

We studied the formation of surface layers hardened by plasma-enhanced oxidation of the silicone elastomer poly(dimethylsiloxane). We explored the largest parameter space surveyed to date. The surface layers may wrinkle, crack, or both, under conditions that at times are controlled by design, but more often have been discovered by trial-and-error. We find four distinct topographies: flat/wrinkled/cracked/cracked and wrinkled. Each topography is clearly separated in the space of plasma dose versus plasma pressure. We analyzed wrinkle amplitude and wavelength by atomic force microscopy in the tapping mode. From these dimensions we calculated the elastic modulus and thickness of the hard surface layer, and inferred a graded hardness, by employing a modified theoretical model. Our main result is the identification of the parameters under which the technologically important pure wrinkled, crack-free topography is obtained.