Published June 27, 2011 | Version v1
Journal article

3.4 GHz composite thin film bulk acoustic wave resonator for miniaturized atomic clocks

  • 1. Laboratoire de Ceramique, Ecole Polytechnique Federale de Lausanne (EPFL), 1015 Lausanne (Switzerland)

Description

Triple layer SiO2/AlN/SiO2 composite thin film bulk acoustic wave resonators (TFBARs) were studied for applications in atomic clocks. The TFBAR's were tuned to 3.4 GHz, corresponding to half the hyperfine splitting of the ground state of rubidium 87Rb atoms. The quality factor (Q) was equal to 2300 and the temperature coefficient of the resonance frequency fr amounted to 1.5 ppm/K. A figure of merit Qfr of ∼ 0.8 x 1013 Hz and a thickness mode coupling factor of 1% were reached. Such figures are ideal for frequency sources in an oscillator circuit that tracks the optical signal in atomic clocks.

Additional details

Identifiers

Publishing Information

Journal Title
Applied Physics Letters
Journal Volume
98
Journal Issue
26
Journal Page Range
p. 262902-262902.3
ISSN
0003-6951
CODEN
APPLAB

Optional Information

Notes
(c) 2011 American Institute of Physics