Microanalysis by the particle-induced x-ray emission method

The present activities of the microanalysis using small sized accelerator techniques reviewed. The PIXE method (Particle-Induced X ray Emission) has better sensitivities for many element detections than those by the neutron activation analysis. Small sized Van de Graaf or Cockcroft Walton accelerators with low energies are not so expensive and very useful for the extremely low level microanalysis. (auth.)