Published July 30, 2009 | Version v1
Journal article

Fabrication of micro-gratings on Au-Cr thin film by femtosecond laser interference with different pulse durations

  • 1. Key Laboratory for Physical Electronics and Devices of the Ministry of Education and Key Laboratory of Photonics Technology for Information, Shaanxi Province, School of Electronics and Information Engineering, Xi'an Jiaotong University, No. 28, Xianning West Road, Xi'an 710049 (China)

Description

We encoded surface relief micro-gratings on Au-Cr thin films using two-beam interference of femtosecond laser pulses with the durations from 25 fs to 70 fs. The dependence of the fabrication quality on the pulse duration has been investigated both numerically and experimentally. The results revealed that the shorter pulses were preferable to prepare periodical microstructures with minimal ablation fringe width and satisfied fabrication quality. This work has potential applications on periodic functional microstructures fabrication for ultra-fine processing and modification on various materials, especially for intractable materials.

Availability note (English)

Available from http://dx.doi.org/10.1016/j.apsusc.2009.06.057

Additional details

Identifiers

DOI
10.1016/j.apsusc.2009.06.057;
PII
S0169-4332(09)00789-2;

Publishing Information

Journal Title
Applied Surface Science
Journal Volume
255
Journal Issue
20
Journal Page Range
p. 8483-8487
ISSN
0169-4332
CODEN
ASUSEE

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
44017705
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
ABLATION; BEAMS; INTERFERENCE; LASER RADIATION; METALS; MICROSTRUCTURE; PERIODICITY; PULSES; SURFACES; THIN FILMS
Descriptors DEC
ELECTROMAGNETIC RADIATION; ELEMENTS; FILMS; RADIATIONS; VARIATIONS

Optional Information

Copyright
Copyright (c) 2009 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.