A simple and reliable system for in situ deposition of large-area double-sided, superconducting films

The design and realization of a simple and reliable convertible diode/magnetron deposition system allowing the in situ production of both high-Tc superconducting oxide films and low-Tc superconducting metallic films is presented. The ability to produce high-quality double-sided in situ films with uniform characteristics over 2'' diameter targets is demonstrated. This apparatus can represent a valid alternative to more sophisticated, less flexible deposition systems and is well suited for application in the large-scale production of superconducting filters for wireless communications. (author)