Published March 1989 | Version v1
Journal article

Epitaxial growth of high-temperature superconducting thin films

  • 1. Electrical and Computer Engineering and Materials Departments, University of California, Santa Barbara, California 93106

Description

We report the development of molecular-beam epitaxy (MBE) techniques for the growth of high-temperature, perovskite-like superconductors. The use of a plasma source of active oxygen allows the in situ growth of such layers. Some of the films grown this way were superconducting as grown. Smooth films exhibiting streaked reflection high-energy electron diffraction (RHEED) patterns, were obtained by using shuttering to kinetically control the growth process. We also report initial results of experiments in which kinetic control is used to layer metastable, nonequilibrium structures in the bismuthstrontium--calcium--copper--oxide system

Additional details

Publishing Information

Journal Title
Journal of Vacuum Science and Technology, B
Journal Volume
7
Journal Issue
2
Series
J. Vac. Sci. Technol., B.
Journal Page Range
319-323
ISSN
0734-211X
CODEN
JVTBD