Spectroscopic evaluation researches on soft x-ray optical elements. Fabrication and evaluation of Cr/Sc multilayers for soft X-ray mirrors

We have fabricated and evaluated multilayers applied to optical elements such as x-ray mirrors. Multilayer mirrors were fabricated by means of the ion beam sputtering method. Chromium/Scandium (Cr/Sc) multilayer mirrors were fabricated by changing acceleration voltage and ion beam current of the Ar ion gun independently to evaluate the deposition condition on the multilayer structure and the optical property. The multilayer structure evaluated by x-ray diffraction measurements has proved that the Cr/Sc multilayer has the most stable structure when the ion gun has been operated at 800V and 50 mA for acceleration voltage and beam current, respectively, and is suitable for the x-ray mirror. (author)