Analysis of sub-boil distilled water, hydrochloric and nitric acid for trace element impurities by ICP-MS

A method has been designed for the precise estimation of a few trace and ultra-trace elements in high purity sub-boil distilled water and hydrochloric and nitric acids using inductively coupled plasma mass spectrometers of two different makes. The trace element concentrations of majority of the elements analysed in sub-boil distilled water are found to be below detection limits. A comparison of the trace element impurity levels obtained in hydrochloric and nitric acids with the maximum allowable impurity levels for high purity reagents documented in SEMI, suggests that these purity levels confirm with the specifications given for the high pure reagents. (author)