Ion implantation and annealing effect on the bubble collapse field and FMR spectrum of ferrite-garnet epitaxial films

Ferrite-garnet epitaxial films have been implanted by Ne20+ ions with 60 and 100 keV energy with doses (0.5-5)x1018xm-2, the temperature of films in the course of implantation constituting 20 and 300 deg C. The implantation conditions and subsequent isothermal annealing effect on the collapse field of ''normal'' bubbles of 2 mkm diameter and that of isochronous annealing on the inhomogeneous spin-wave resonance spectra is investigated. Some conclusions are drawn. The arising in ion-implanted films the layer with anisotropy of the ''light plane'' type does not disappear up to temperatures of 950 deg C of hour annealing. In ion implantation as the dose increases, the implanted layer magnetization is stabilized at a certain value determined by the implantation temperature. Realization of ion implantation at increased temperature leads to essential stabilization of collapse field in the course of subsequent thermal operations at manufacturing bubble-devices. In implanted ferrite-garnet films various quantity of peaks of inhomogeneous spin-wave resonance is observed