Published March 1, 1999
| Version v1
Report
Advances in multilayer reflective coatings for extreme-ultraviolet lithography
Description
no abstract available
Availability note (English)
Available from www.als.lbl.govAdditional details
Publishing Information
- Imprint Pagination
- [vp.]
- Report number
- LBNL/ALS--25522
Conference
- Title
- 24. SPIE International Society for Optical Engineering
- Dates
- 14-19 Mar 1999
- Place
- Santa Clara, CA (United States)
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 33061178
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- No Abstract, Conference, Non-conventional Literature
- Descriptors DEI
- EXTREME ULTRAVIOLET RADIATION; FILMS; LAYERS; OPTICS; REFLECTIVE COATINGS; SURFACE PROPERTIES
- Descriptors DEC
- COATINGS; ELECTROMAGNETIC RADIATION; RADIATIONS; ULTRAVIOLET RADIATION
Optional Information
- Contract/Grant/Project number
- AC03-76SF00098
- Funding organization
- US Department of Energy (United States)