Published August 2003
| Version v1
Journal article
LIGA process - micromachining technique using synchrotron radiation lithography - and some industrial applications
Creators
Description
We developed the LIGA (Lithographie or lithography/Galvanoformung or electroforming/Abformung or molding) process using a compact synchrotron radiation (SR) source. To make a compact SR source applicable for the LIGA process, we developed a highly sensitive resist and highly transparent mask for deep SR lithography. We commercialized two devices, a piezoelectric composite and a microprobe for IC testing. A microconnector and optical switch were also developed
Additional details
Identifiers
- PII
- S0168583X03006323;
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
- Journal Volume
- 208
- Journal Issue
- 3
- Journal Page Range
- p. 21-26
- ISSN
- 0168-583X
- CODEN
- NIMBEU
Conference
- Title
- 5. conference on ionizing radiation and polymers
- Dates
- 21-26 Sep 2002
- Place
- Sainte-Adele, PQ (Canada)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Pakistan
- INIS RN
- 35054221
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ABLATION; INTEGRATED CIRCUITS; MACHINING; MASKING; MATERIALS WORKING; MOLDING; PIEZOELECTRICITY; SYNCHROTRON RADIATION
- Descriptors DEC
- BREMSSTRAHLUNG; ELECTRICITY; ELECTROMAGNETIC RADIATION; ELECTRONIC CIRCUITS; FABRICATION; MICROELECTRONIC CIRCUITS; RADIATIONS
Optional Information
- Copyright
- Copyright (c) 2003 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.