Published May 30, 1988
| Version v1
Journal article
Plasma polymerization for high T/sub c/ oxide superconductors
Creators
- 1. Fujitsu Laboratories, Ltd., 10-1 Morinosato Wakamiya, Atsugi 243-01, Japan
Description
Plasma polymerization using CHF3 gas, which prevents the degradation of high T/sub c/ oxide superconductors due to moisture and annealing, was developed. The resistive transitions of Y1Ba2Cu3O/sub x/ thin films, coated by plasma polymerization, did not change before and after soaking in 20 0C water for 60 min. In addition, the critical temperature of those films was unchanged after annealing at 200 0C for 30 min in air, and then soaking in 90 0C water for 10 min. We confirmed that the polymer film grown by this method was dense, and the Y1Ba2Cu3O/sub x/ film reacted with the fluorine at the interface using x-ray photoelectron spectroscopy
Additional details
Publishing Information
- Journal Title
- Appl. Phys. Lett.
- Journal Volume
- 52
- Journal Issue
- 22
- Series
- Appl. Phys. Lett.
- Journal Page Range
- 1897-1898
- ISSN
- 0003-6951
- CODEN
- APPLA
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 19075916
- Subject category
- S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
- Descriptors DEI
- ANNEALING; BARIUM OXIDES; CARBON FLUORIDES; COATINGS; COPPER OXIDES; CORROSION PROTECTION; CRITICAL TEMPERATURE; PHOTOELECTRON SPECTROSCOPY; POLYMERIZATION; SUPERCONDUCTING FILMS; SURFACE COATING; SURFACE TREATMENTS; YTTRIUM OXIDES
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; BARIUM COMPOUNDS; CARBON COMPOUNDS; CHALCOGENIDES; CHEMICAL REACTIONS; COPPER COMPOUNDS; DEPOSITION; ELECTRON SPECTROSCOPY; FILMS; FLUORIDES; FLUORINE COMPOUNDS; HALIDES; HALOGEN COMPOUNDS; HEAT TREATMENTS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SPECTROSCOPY; THERMODYNAMIC PROPERTIES; TRANSITION ELEMENT COMPOUNDS; TRANSITION TEMPERATURE; YTTRIUM COMPOUNDS