Published May 30, 1988 | Version v1
Journal article

Plasma polymerization for high T/sub c/ oxide superconductors

  • 1. Fujitsu Laboratories, Ltd., 10-1 Morinosato Wakamiya, Atsugi 243-01, Japan

Description

Plasma polymerization using CHF3 gas, which prevents the degradation of high T/sub c/ oxide superconductors due to moisture and annealing, was developed. The resistive transitions of Y1Ba2Cu3O/sub x/ thin films, coated by plasma polymerization, did not change before and after soaking in 20 0C water for 60 min. In addition, the critical temperature of those films was unchanged after annealing at 200 0C for 30 min in air, and then soaking in 90 0C water for 10 min. We confirmed that the polymer film grown by this method was dense, and the Y1Ba2Cu3O/sub x/ film reacted with the fluorine at the interface using x-ray photoelectron spectroscopy

Additional details

Publishing Information

Journal Title
Appl. Phys. Lett.
Journal Volume
52
Journal Issue
22
Series
Appl. Phys. Lett.
Journal Page Range
1897-1898
ISSN
0003-6951
CODEN
APPLA