Published 1981 | Version v1
Report

Study of influence of metal spraying on the membrane pump performances

Description

Effect of fine (approximately 1 μm) films made of Ni, Cr, Ti, Nb on the hydrogen pumping-out rate by palladium pump is studied. Coatings have been applied by plasma-arc method in the atmosphere of argon at pressure of about 1 Pa. The character of the dependence of pumping-out rate on pressure is different for different coatings: in a case of hydrogen pumping-out by pure palladium the dependence is close to Psup(-1/2), during the Ti and Ni films application this dependence is weaker and for Nb and Cr coatings it is practically absent. Activation energy changes in the range of 2.7-9.6 kkal/mol, and relative rate of pumping-out constitutes 10-54%. Sputting of very different metals results in the decrease of the quickness of pumping- out of membrane pump, which is especially sufficient in the case of Nb and Cr films sputtering on the Pd surface

Additional details

Additional titles

Original title (Russian)
Исследование влияния распыления металлов на работу мембранных насосов

Publishing Information

Imprint Title
General and nuclear physics
Imprint Pagination
120 p.
Journal Issue
no. 1(15
Series
Voprosy atomnoj nauki i tekhniki.
Journal Page Range
p. 18-20.
Report number
KFTI--81-22

INIS

Country of Publication
USSR
Country of Input or Organization
USSR
INIS RN
13704233
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Descriptors DEI
EFFICIENCY; HIGH TEMPERATURE; METALS; PALLADIUM; SPUTTERING; TEMPERATURE DEPENDENCE; VACUUM PUMPS
Descriptors DEC
ELEMENTS; PLATINUM METALS; PUMPS; TRANSITION ELEMENTS

Optional Information

Notes
10 refs.; 3 figs.; 1 tab. Imprint:Obshchaya i yadernaya fizika.