Published June 1984
| Version v1
Journal article
Synthetic standards for the quantitative determination of elements in thin resistance layers by means of neutron activation analysis
Creators
- 1. Akademie der Wissenschaften der DDR, Dresden. Zentralinstitut fuer Festkoerperphysik und Werkstofforschung
Description
By taking into account the sample geometry in preparing plane standards accurate results can be obtained from neutron activation analyses of CrSiW layers (size: 0.25 to 1.5 cm2, mass: 5 to 50 μg, thickness: 20 to 80 nm). The accuracy of the Cr and W values has been compared with results obtained from other methods. The precision of standard sample preparation is 0.003
Additional details
Additional titles
- Original title (German)
- Einsatz synthetischer Messstandards zur quantitativen Element-Bestimmung in duennen Widerstandsschichten mittels Neutronenaktivierungsanalyse
Publishing Information
- Journal Title
- Isotopenpraxis
- Journal Volume
- 20
- Journal Issue
- 6
- Series
- Isotopenpraxis.
- Journal Page Range
- 221-223
- ISSN
- 0021-1915
Conference
- Title
- 3. meeting on nuclear analysis.
- Dates
- 11-15 Apr 1983.
- Place
- Dresden (German Democratic Republic).
INIS
- Country of Publication
- Germany
- Country of Input or Organization
- German Democratic Republic
- INIS RN
- 15045907
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ACCURACY; CALIBRATION STANDARDS; CHROMIUM; LAYERS; NEUTRON ACTIVATION ANALYSIS; SILICON; TUNGSTEN
- Descriptors DEC
- ACTIVATION ANALYSIS; CHEMICAL ANALYSIS; ELEMENTS; METALS; SEMIMETALS; TRANSITION ELEMENTS