Published March 2007 | Version v1
Journal article

Voltage oxide removal for plating: A new method of electroplating oxide coated metals in situ

  • 1. Department of Chemical Engineering, Columbia University, New York, New York 10027 (United States)

Description

A novel in situ method for electroplating oxide coated metals is described. Termed VORP, for voltage oxide removal for plating, the process utilizes a voltage pulse ∼20-200 V, ∼2 ms in duration, applied between working and counterelectrodes while both are immersed in a copper electrolyte. The pulse is almost immediately followed by galvanostatic plate-up. Adherent copper deposits up to ∼4 μm in height on stainless steel 316 coupons have been obtained. Temperature testing up to 260 deg. C in air does not affect the copper adhesion. A preliminary model for oxide removal is proposed utilizing concepts of dielectric breakdown

Additional details

Identifiers

Publishing Information

Journal Title
Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films
Journal Volume
25
Journal Issue
2
Journal Page Range
p. 319-323
ISSN
1553-1813

Optional Information

Notes
(c) 2007 American Vacuum Society